BS ISO 14237:2000

BS ISO 14237:2000


Full Specification Given Below:

Standard BS ISO 14237:2000
Title Identifier Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
Status CU
Publication Date 15/04/00
Committee CII/60
Approximate Price 92.00
Notes
ISBN 0 580 34674 9
Pages 22
International Equivalent ISO 14237:2000
Descriptors Surface chemistry, Chemical analysis and testing, Surface properties, Secondary, Ions, Mass spectrometry, Spectroscopy, Determination of content, Boron, Concentration (chemical), Single, Crystals, Silicon, Homogeneity, Doping agents, Semiconductor technology, Calibration, Control samples, Test equipment, Specimen preparation, Test methods, Mathematical calculations, Precision, Statistical methods of analysis, Isotopes, Performance testing
Cross references ISO 5725-2:1994
Replaces
Replaces Notes
Replaced By
Replaced by Notes


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