BS ISO 14706:2000

BS ISO 14706:2000


Full Specification Given Below:

Standard BS ISO 14706:2000
Title Identifier Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray flourescence (TXRF) spectroscopy
Status CU
Publication Date 15/05/01
Committee CII/60
Approximate Price 92.00
Notes
ISBN 0 580 37252 9
Pages 32
International Equivalent ISO 14706:2000
Descriptors Surface chemistry, Surface properties, Surfaces, Surfactants, Chemical analysis and testing, Contamination, Contaminants, Silicon, Substrates (insulating), X-ray fluorescence spectrometry, X-ray analysis, Fluorimetry, Reflection, Atoms, Density, Epitaxial layers
Cross references ISO 5725-2:1994, ISO 14644-1
Replaces
Replaces Notes
Replaced By
Replaced by Notes


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